Efficient multiphoton polymerization for the fabrication of 3-dimensional microstructures

被引:6
作者
Baldacchini, T [1 ]
Farrer, RA
Moser, J
Fourkas, JT
Naughton, MJ
机构
[1] Boston Coll, Eugene F Merkert Chem Ctr, Chestnut Hill, MA 02467 USA
[2] Boston Coll, Dept Phys, Chestnut Hill, MA 02467 USA
关键词
multiphoton polymerization; microfabrication;
D O I
10.1016/S0379-6779(02)01024-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A commercially-available photoinitiator has been employed to perform efficient multiphoton polymerization of acrylate resins. We demonstrate 2- and 3-dimensional structures with micron feature sizes that have been created with this resin system at low laser powers using objectives with modest numerical apertures.
引用
收藏
页码:11 / 12
页数:2
相关论文
共 8 条
[1]   Multiphoton photopolymerization with a Ti:sapphire oscillator [J].
Baldacchini, T ;
Chen, H ;
Farrer, RA ;
Previte, MJR ;
Moser, J ;
Naughton, MJ ;
Fourkas, JT .
COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST AND FREE-ELECTRON LASERS, 2002, 4633 :136-144
[2]   Near-IR two-photon photoinitiated polymerization using a fluorone/amine initiating system [J].
Belfield, KD ;
Ren, XB ;
Van Stryland, EW ;
Hagan, DJ ;
Dubikovsky, V ;
Miesak, EJ .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2000, 122 (06) :1217-1218
[3]   Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication [J].
Cumpston, BH ;
Ananthavel, SP ;
Barlow, S ;
Dyer, DL ;
Ehrlich, JE ;
Erskine, LL ;
Heikal, AA ;
Kuebler, SM ;
Lee, IYS ;
McCord-Maughon, D ;
Qin, JQ ;
Röckel, H ;
Rumi, M ;
Wu, XL ;
Marder, SR ;
Perry, JW .
NATURE, 1999, 398 (6722) :51-54
[4]   2-PHOTON LASER SCANNING FLUORESCENCE MICROSCOPY [J].
DENK, W ;
STRICKLER, JH ;
WEBB, WW .
SCIENCE, 1990, 248 (4951) :73-76
[5]   Finer features for functional microdevices - Micromachines can be created with higher resolution using two-photon absorption. [J].
Kawata, S ;
Sun, HB ;
Tanaka, T ;
Takada, K .
NATURE, 2001, 412 (6848) :697-698
[6]   Two-photon microstructure-polymerization initiated by a coumarin derivative/iodonium salt system [J].
Li, CD ;
Luo, L ;
Wang, SF ;
Huang, WT ;
Gong, QH ;
Yang, YY ;
Feng, SJ .
CHEMICAL PHYSICS LETTERS, 2001, 340 (5-6) :444-448
[7]   Three-dimensional microfabrication with two-photon-absorbed photopolymerization [J].
Maruo, S ;
Nakamura, O ;
Kawata, S .
OPTICS LETTERS, 1997, 22 (02) :132-134
[8]   Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures [J].
Witzgall, G ;
Vrijen, R ;
Yablonovitch, E ;
Doan, V ;
Schwartz, BJ .
OPTICS LETTERS, 1998, 23 (22) :1745-1747