CVD growth of single-walled carbon nanotubes using size-controlled nanoparticle catalyst

被引:67
作者
Kobayashi, Y
Nakashima, H
Takagi, D
Homma, Y
机构
[1] NTT Corp, Basic Res Labs, Atsugi, Kanagawa 2430198, Japan
[2] Meiji Univ, Tama Ku, Kawasaki, Kanagawa 2148571, Japan
关键词
carbon nanotube; CVD; nanoparticle catalyst;
D O I
10.1016/j.tsf.2004.06.045
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We investigated single-walled carbon nanotube (SWNT) growth using a novel Fe3O4 nanoparticle catalyst synthesized with a simple organic chemistry process. We characterized the structure of the grown SWNT's through scanning electron microscopy (SEM), atomic force microscopy (AFM) and microscopic Raman spectroscopy. Discrete nanoparticles with a uniform diameter of similar to 4 nm could be deposited on Si substrates with a thermal oxide layer by spin-coating with a nanoparticle solution. Nanoparticles prepared under optimum conditions remained discrete and uniform without aggregation even after chemical vapor deposition (CVD) process and their diameters were reduced to similar to 1.7 nm due to decomposition reactions during CVD. These nanoparticles were found to have remarkable catalytic activity in the CVD growth of the SWNTs. SWNTs with diameters of around 1 nm were produced from the reduced nanoparticle catalyst. The diameters of the grown SWNTs were closely correlated with those of the catalytic nanoparticles and tended to be slightly smaller than the particle size. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:286 / 289
页数:4
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