An integrated liquid mixer/valve

被引:59
作者
Voldman, J [1 ]
Gray, ML
Schmidt, MA
机构
[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
[2] MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA
[3] MIT, Dept Hlth Sci & Technol, Cambridge, MA 02139 USA
基金
美国国家科学基金会;
关键词
fluid flow; fluorescense; liquid valving; microfluidics; micromachining; mixers; wafer bonding;
D O I
10.1109/84.870054
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present an integrated liquid mixer/valve to be used for sample preparation for bioscience analysis systems. The mixer/valve is a glass-silicon bonded structure with a wafer-bonded cantilever-plate flapper valve and deep reactive-ion etched ports. It is passively pressure actuated and is distinguished by the fact that it can perform both a mixing and valving function simultaneously to mix two liquids noncontinuously. We present the design and fabrication of the mixer/valve and show that it successfully performs both its valving and mixing functions, including the discontinuous mixing of two liquids. We propose a method for characterizing mixing in this device using fluorescence microscopy and the pH dependence of fluorescein fluorescence. This method aims to allow one to extract the mixing length from a quantifiable observable. We present modeling and results of mixing length measurements using this method.
引用
收藏
页码:295 / 302
页数:8
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