AlSb/InAs HEMTs using modulation InAs(Si)-doping

被引:9
作者
Boos, JB [1 ]
Bennett, BR [1 ]
Kruppa, W [1 ]
Park, D [1 ]
Yang, MJ [1 ]
Shanabrook, BV [1 ]
机构
[1] USN, Res Lab, Washington, DC 20375 USA
关键词
D O I
10.1049/el:19980219
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
AlSb/InAs HEMTs have been fabricated using Si-coping in a very thin (9 Angstrom) InAs layer located in the upper AlSb barrier. Quantum Hall measurements show that there is no parallel channel. Devices with a 0.5 mu m gate length exhibit a drain current density of > 1A/mm and an f(T)L(g) product of 30 GHz mu m at V-DS = 0.4 V after correction for the gate bonding pad capacitance.
引用
收藏
页码:403 / 404
页数:2
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