Quantitative analysis of deuterium in a-C:D layers, a Round Robin experiment

The absolute amount of deuterium in amorphous deuterated carbon (a-C:D) layers has been measured by six laboratories with different techniques, such as MeV ion beam analysis, secondary ion mass spectrometry (SIMS), and thermal desorption spectrometry (TDS). The a-C:D lavers have been deposited from a CDS glow discharge plasma onto carbon and silicon substrates. The results for the absolute numbers obtained with the different analysing techniques show a scatter of up to about 35% around the average value. These deviations are larger than the errors stated by the experimentalists and indicate possible systematic uncertainties in some of the measurements. (C) 2000 Elsevier Science B.V. All rights reserved.