Lightweight, optically flat micromirrors for fast beam steering

被引：37

作者：

Nee, JT ^{[1
]}

Conant, RA ^{[1
]}

Muller, RS ^{[1
]}

Lau, KY ^{[1
]}

机构：

[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2000年

关键词：

D O I：

10.1109/OMEMS.2000.879602

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have demonstrated flat, lightweight micromirrors with high resonant frequencies for fast beam steering. The low mass of these tensile-optical-surface (TOS) micromirrors, which consist of tensile polysilicon membranes stretched across stiff, single-crystal silicon-rib structures, enables the mirrors to have both high resonant frequencies and large DC deflection angles. The TOS mirrors can scan at frequencies up to 68.2 kHz while limiting dynamic deformation to be less than similar to 70 nm (approximately lambda /10 at the measurement wavelength of 688 nm). Dynamic deformation as low as 20 nm has been shown on a lower-frequency design having a wider support rib. The effect of adding a 50 nm-thick layer of gold to improve reflectivity is negligible on the deformation of the micromirror.

引用

页码：9 / 10

页数：2