Studies on phase transformations of Cu-phthalocyanine thin films

被引:132
作者
Berger, O [1 ]
Fischer, WJ
Adolphi, B
Tierbach, S
Melev, V
Schreiber, J
机构
[1] Dresden Univ Technol, Semicond & Microsyst Technol Lab, D-8027 Dresden, Germany
[2] EADQ Dresden, Fraunhofer Inst Nondestruct Testing, Dresden, Germany
关键词
D O I
10.1023/A:1008933516940
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Copper phthalocyanine (CuPc) thin films were obtained by a sublimation technique on Si wafer substrates maintained at room temperature. As-deposited CuPc films with less than 0.1 mu m thickness crystallize primarily in the alpha-form with a preferential orientation of the crystallites in the [2 0 0] direction. The effect of randomizing of the orientation of the CuPc crystallites is observed as the film thickness increases, whereas the preference in appearance of the alpha-form remains. The changes in phase composition, structure, morphology and surface chemical composition of as-deposited CuPc thin films due to different heat treatment conditions were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS).
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页码:331 / 346
页数:16
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