Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors

被引：27

作者：

Schöning, MJ ^{[1
]}

Malkoc, Ü ^{[1
]}

Thust, M ^{[1
]}

Steffen, A ^{[1
]}

Kordos, P ^{[1
]}

Lüth, H ^{[1
]}

机构：

[1] Forschungszentrum Julich, Inst Schicht & Ionentech, D-52425 Julich, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 65卷 / 1-3期

关键词：

EIS capacitors; structured silicon; porous silicon; pH sensitivity;

D O I：

10.1016/S0925-4005(99)00349-4

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors, which allow an efficient miniaturization, have been developed. These sensors have been prepared using standard techniques of semiconductor processing. Both sensor types exhibit a high, near-Nernstian pH sensitivity of about 54 mV per decade. Due to the enlargement of the active sensor area, the measured capacitance values increase up to a factor of 30. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：288 / 290

页数：3

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