Development of a C60+ ion gun for static SIMS and chemical imaging

被引：124

作者：

Wong, SCC

Hill, R

Blenkinsopp, P

Lockyer, NP

Weibel, DE

Vickerman, JC

机构：

[1] Univ Manchester, Inst Sci & Technol, Dept Chem, Surface Anal Res Ctr, Manchester M60 1QD, Lancs, England

[2] Ionopt Ltd, Southampton, Hants, England

来源：

APPLIED SURFACE SCIENCE | 2003年 / 203卷

关键词：

polyatomic; ion source; C-60; SSIMS; Ga;

D O I：

10.1016/S0169-4332(02)00629-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

This paper reports initial data from the application of the first dedicated buckminsterfullerene ion beam system developed for routine use on existing ToF-SIMS instruments for static SIMS and chemical imaging. The ion gun provides a selectable beam of C-60(+) and C-60(2+) primary ions, producing a nA beam Of C-60(+) focusable to 1 mum spot size. The results of comparative studies of bulk polymers and thin films using C-60(+) and Ga+ ions are presented. Compared to Ga+, C-60(+) provides a very substantial increase in real ion yields, especially at high mass, with no concomitant increase in the relative yield of low mass fragments. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：219 / 222

页数：4