Review of multilayer normal-incidence gratings operating at 9 nm-40 nm wavelengths

被引：5

作者：

Seely, JF ^{[1
]}

机构：

[1] USN, Res Lab, Space Sci Div, Washington, DC 20375 USA

来源：

X-RAY MIRRORS, CRYSTALS, AND MULTILAYERS II | 2002年 / 4782卷

关键词：

D O I：

10.1117/12.451353

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

It is now possible to reliably implement multilayer-coated diffraction gratings in spaceflight and laboratory spectrometers that operate at normal incidence and with high efficiency in the 9 nm to 40 nm wavelength range. The design and fabrication of the grating groove profile and the matching multilayer coating are based on computational modeling using the computer program PCGRATE. The multilayer gratings are characterized using atomic force microscopy and by measuring the diffraction efficiency using synchrotron radiation. Recent research has focused on multilayer coatings other than Mo/Si such as Sc/Si for 40 nm, MoRu/Be for 11 nm, and Mo/Y for 9 nm.

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页码：224 / 229

页数：6

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