Metal films;
Failure strain;
Thickness;
Yield strength;
Texture;
ABNORMAL GRAIN-GROWTH;
CU THIN-FILMS;
MECHANICAL-PROPERTIES;
BEHAVIOR;
TENSILE;
EVOLUTION;
DIFFRACTION;
D O I:
10.1016/j.actamat.2009.11.010
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
We perform uniaxial tensile tests on polyimide-supported copper films with a strong (1 1 1) fiber texture and with thicknesses varying from 50 nm to 1 mu m. Films with thicknesses below 200 nm fail by intergranular fracture at elongations of only a few percent. Thicker films rupture by ductile transgranular fracture and local debonding from the substrate. The failure strain for transgranular fracture exhibits a maximum for film thicknesses around 500 nm. The transgranular failure mechanism is elucidated by performing finite element simulations that incorporate a cohesive zone along the film/substrate interface. As the film thickness increases from 200 to 500 nm, a decrease in the yield stress of the film makes it more difficult for the film to debond from the substrate, thus increasing the failure strain. As the thickness increases beyond 500 nm, however, the fraction of (1 0 0) grains in the (1 1 1)-textured films increases. On deformation, necking and debonding initiate at the (1 0 0) grains, leading to a reduction in the failure strain of the films. (c) 2009 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.