Single-mode condition for silicon rib waveguides

被引：73

作者：

Powell, O ^{[1
]}

机构：

[1] Griffith Univ, Sch Microelect Engn, CRC Micro Technol, Brisbane, Qld 4111, Australia

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2002年 / 20卷 / 10期

关键词：

beam propagation method (BPM); optical propagation; optical waveguide theory; rib waveguides; silicon-on-insulator (SOI) technology;

D O I：

10.1109/JLT.2002.804036

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The geometrical conditions required for single-mode propagation in large cross-section silicon-on-insulator (SOI) waveguides were investigated using the beam propagation method (BPM). The cases of both vertical-walled and sloping-walled (trapezoidal) rib structures were considered. In the trapezoidal case some approximate methods were compared with the simulated results. Expressions for the single-mode condition for both types of waveguide were defined.

引用

页码：1851 / 1855

页数：5

共 19 条

[1]

ADAMS MJ, 1981, INTRO OPTICAL WAVEGU, P30

[2]

CLARK DF, 1998, ELECTRON LETT, V24, P1414

[3] ANALYSIS OF RIB DIELECTRIC WAVE-GUIDES [J].

DAGLI, N ;

FONSTAD, CG .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1985, 21 (04) :315-321

[4] Guided-wave optics in silicon-on-insulator technology [J].

Jalali, B ;

Trinh, PD ;

Yegnanarayanan, S ;

Coppinger, F .

IEE PROCEEDINGS-OPTOELECTRONICS, 1996, 143 (05) :307-311

[5]

Kaiser P., 1973, Bell System Technical Journal, V52, P265

[6]

Knox R.M., 1970, P MRI S SUBMILLIMETE, P497

[7] ANISOTROPIC ETCHING OF SILICON [J].

LEE, DB .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) :4569-&

[8]

MARCATILI EA, 1973, BELL SYST TECHNOL J, V53, P645

[9] NEW WAVEGUIDE STRUCTURES FOR MILLIMETER-WAVE AND OPTICAL INTEGRATED-CIRCUITS [J].

MCLEVIGE, WV ;

ITOH, T ;

MITTRA, R .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1975, 23 (10) :788-794

[10] NUMERICAL-ANALYSIS OF A RIB OPTICAL-WAVEGUIDE WITH TRAPEZOIDAL CROSS-SECTION [J].

MIYAMOTO, T .

OPTICS COMMUNICATIONS, 1980, 34 (01) :35-38

← 1 2 →