Optical properties of TixAl1-xN thin films in the whole compositional range

被引：18

作者：

Kassavetis, S. ^{[1
]}

Abadias, G. ^{[2
]}

Vourlias, G. ^{[3
]}

Bantsis, G. ^{[1
]}

Logothetidis, S. ^{[3
]}

Patsalas, P. ^{[3
]}

机构：

[1] Univ Ioannina, Dept Mat Sci & Engn, GR-45110 Ioannina, Greece

[2] Univ Poitiers, Dept Phys & Mecan Mat, Inst Pprime, CNRS,ENSMA, F-86962 Futuroscope, France

[3] Aristotle Univ Thessaloniki, Dept Phys, GR-54124 Thessaloniki, Greece

来源：

SURFACE & COATINGS TECHNOLOGY | 2016年 / 295卷

关键词：

TixAl1; N-; x; Optical properties; Optical absorption; Resistivity; Crystal structure; ELECTRONIC-STRUCTURE; TITANIUM NITRIDE; COATINGS; ABSORBER; PERFORMANCE; SYSTEM;

D O I：

10.1016/j.surfcoat.2015.08.049

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present a study on a wide variety of TixAl1 - xN magnetron sputtered thin films, covering the whole compositional range (0 <= x <= 1) and exhibiting both the hexagonal and cubic phases, using spectroscopic ellipsometry (SE) and the optical modeling based on Drude's model and two Lorentz oscillators in order to study the intraband and interband absorption. The cubic B1-TixAl1 - xN phase is formed for x > 0.3 and it is electrically conductive with conduction electron density and resistivity/conductivity varying with the Al content, while the hexagonal phase w-TixAl1 - xN (x < 0.3) is transparent in the visible range and its fundamental gap varies with the Ti content. The optical and electronic properties are associated with the chemical composition and microstructure of TixAl1 - xN and its vast range from high band gap semiconductor to electron conductor offers exceptional potential for a variety of applications of TixAl1 - xN in electronics. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：125 / 129

页数：5

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