Template-based and template-free preparation of nanostructured parylene via oblique angle polymerization

被引：26

作者：

Demirel, Goekhan ^{[1
,2
]}

Malvadkar, Niranjan ^{[1
,2
]}

Demirel, Melik C. ^{[1
,2
,3
]}

机构：

[1] Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA

[2] Penn State Univ, Dept Engn Sci, University Pk, PA 16802 USA

[3] Penn State Univ, Huck Inst Life Sci, University Pk, PA 16802 USA

来源：

THIN SOLID FILMS | 2010年 / 518卷 / 15期

关键词：

Nanostructures; Polymers; Chemical vapor deposition; Structural properties; Growth mechanism; Surface morphology; POLY(P-XYLYLENE) FILMS; VAPOR-DEPOSITION; THIN-FILMS; NANOTUBES; FABRICATION; EVAPORATION;

D O I：

10.1016/j.tsf.2009.12.096

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Parylene is an important class of polymer thin film that has wide-ranging applications due to its well-recognized properties, such as low-dielectric constant, biocompatibility, and exceptional barrier properties. Here, we studied the deposition of parylene nanofibers by template-based and template-free methods, which combine both vapor deposition polymerization and oblique angle deposition. A comparative study of two approaches based on surface characterization techniques is presented. These nanofibers, deposited by both approaches, have potential applications in catalysis, biodetection, and biomedical coatings. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：4252 / 4255

页数：4

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