Sputtering of Au (111) induced by 16-keV Au cluster bombardment: Spikes, craters, late emission and fluctuations

被引:121
作者
Colla, TJ [1 ]
Aderjan, R [1 ]
Kissel, R [1 ]
Urbassek, HM [1 ]
机构
[1] Univ Kaiserslautern, Fachbereich Phys, D-67663 Kaiserslautern, Germany
关键词
D O I
10.1103/PhysRevB.62.8487
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sputtering of a Au (111) surface induced by 16-keV Au-n cluster bombardment (n = 1,2,4,8,12) is studied by molecular-dynamics simulation. A statistically significant picture of the materials effects induced is obtained: With the exception of Au-1 bombartment, sputtering lasts at least 8 ps, a pronounced crater is formed as a rule, and large clusters emitted late from the crater rim contribute substantially to sputtenng. Sputter yield and crater size are strongly positively correlated in each individual impact event. For larger-cluster impact (n greater than or equal to 4), fluctuations in these two quantities shrink, giving the events a macroscopic appearance.
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收藏
页码:8487 / 8493
页数:7
相关论文
共 39 条
[1]   Giant metal sputtering yields induced by 20-5000 keV atom gold clusters [J].
Andersen, HH ;
Brunelle, A ;
Della-Negra, S ;
Depauw, J ;
Jacquet, D ;
Le Beyec, Y ;
Chaumont, J ;
Bernas, H .
PHYSICAL REVIEW LETTERS, 1998, 80 (24) :5433-5436
[2]  
ANDERSEN HH, 1993, VIDENSK SELSK MAT FY, V43, P127
[3]   Molecular dynamics simulation of damage formation by cluster ion impact [J].
Aoki, T ;
Matsuo, J ;
Insepov, Z ;
Yamada, I .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4) :49-52
[4]   Interfacial effects during ion beam processing of metals [J].
Averback, RS ;
Ghaly, M ;
Bellon, P .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1996, 37 (1-3) :38-48
[5]   MD STUDIES OF THE INTERACTIONS OF LOW-ENERGY PARTICLES AND CLUSTERS WITH SURFACES [J].
AVERBACK, RS ;
GHALY, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 90 (1-4) :191-201
[6]  
Averback RS, 1998, SOLID STATE PHYS, V51, P281
[7]   SPUTTERING YIELDS OF CONDENSED RARE-GASES [J].
BALAJI, V ;
DAVID, DE ;
MAGNERA, TF ;
MICHL, J ;
URBASSEK, HM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4) :435-440
[8]  
BEELER JR, 1983, RAD EFFECTS COMPUTER
[9]   ION-ELECTRON INTERACTION IN MOLECULAR-DYNAMICS CASCADES [J].
CARO, A ;
VICTORIA, M .
PHYSICAL REVIEW A, 1989, 40 (05) :2287-2291
[10]   Visualization of keV-ion-induced spikes in metals [J].
Colla, TJ ;
Urbassek, HM .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1997, 142 (1-4) :439-447