Calorimetric measurements of structural relaxation and glass transition temperatures in sputtered films of amorphous Te alloys used for phase change recording

被引：102

作者：

Kalb, J. A. ^{[1
]}

Wuttig, M.

Spaepen, F.

机构：

[1] Rhein Westfal TH Aachen, Phys Inst, D-52056 Aachen, Germany

[2] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA

[3] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

[4] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 2007年 / 22卷 / 03期

关键词：

D O I：

10.1557/JMR.2007.0103

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Sputtered amorphous Ge4Sb1Te5, Ge1Sb2Te4, Ge2Sb2Te5, and Ag0.055In0.065Sb0.59Te0.29 thin films were studied by differential scanning, calorimetry. Upon continuous heating beat release due to structural relaxation of the amorphous phase between 0.5 and 1.0 kJ/mol was observed. This value depends on the thermal history of the sample. Preannealing of the amorphous phase revealed the glass transition temperature T-g within 10 K of the crystallization temperature upon continuous heating at 40 K/min.

引用

页码：748 / 754

页数：7

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