Aligned carbon nanotubes patterned photolithographically by silver

被引：19

作者：

Huang, SM ^{[1
]}

Mau, AHW ^{[1
]}

机构：

[1] CSIRO, Div Mol Sci, Clayton, Vic 3169, Australia

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 05期

关键词：

D O I：

10.1063/1.1541939

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Selective growth of aligned carbon nanotubes (CNTs) by pyrolysis of iron (II) phthalocyanine (FePc) on quartz substrate patterned photolithographically by metallic silver has been demonstrated. Micro/nanopattern of aligned CNTs can be achieved by using a photomask with features on a microscale. With convenient use of simple high-contract black and white films as a photomask, aligned nanotubes patterned with 20 mum resolution in large scale can be fabricated. This practical fabrication of aligned CNTs on patterned conducting substrate could be applied to various device applications of CNTs. (C) 2003 American Institute of Physics.

引用

页码：796 / 798

页数：3

共 31 条

[1] Plasma-induced alignment of carbon nanotubes [J].