The low-pressure Rf plasma as a medium for nitriding iron and steel

被引:44
作者
Baldwin, MJ [1 ]
Collins, GA [1 ]
Fewell, MP [1 ]
Haydon, SC [1 ]
Kumar, S [1 ]
Short, KT [1 ]
Tendys, J [1 ]
机构
[1] AUSTRALIAN NUCL SCI & TECHNOL ORG,MENAI,NSW 2234,AUSTRALIA
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 7B期
关键词
nitriding; rf plasma; stainless steel; low-alloy steel; microhardness; Rutherford backscattering; X-ray diffraction;
D O I
10.1143/JJAP.36.4941
中图分类号
O59 [应用物理学];
学科分类号
摘要
This study compares the nitriding efficiency of a low-pressure pure-nitrogen rf plasma for the materials AISI-316 stainless steel, 99.8% iron and the low-alloy steels AISI 4140 and En41B. The process temperature was 400 degrees C; a range of gas pressures and biasing conditions was explored. The treated samples were examined using instrumented microhardness measurements; proton backscattering, X-ray diffraction and other diagnostics. The degree of nitriding is enhanced by increased bombardment by excited neutral molecules. Ion bombardment assists in the nitriding of iron and the low-alloy steels studied, apparently by aiding the production of Fe2-3N. This phase does not form in the nitriding of 316 stainless steel, and therefore treatment of this material is not assisted by ion bombardment. In comparing low-pressure rf plasmas to procedures involving higher pressures and temperatures, the process described here is more appropriate for hardening austenitic stainless steel, but perhaps less appropriate for the other materials.
引用
收藏
页码:4941 / 4948
页数:8
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