Silicon surface passivation by an organic overlayer of 9,10-phenanthrenequinone

被引:37
作者
Avasthi, Sushobhan [1 ,3 ]
Qi, Yabing [1 ,3 ]
Vertelov, Grigory K. [2 ,3 ]
Schwartz, Jeffrey [2 ,3 ]
Kahn, Antoine [1 ,3 ]
Sturm, James C. [1 ,3 ]
机构
[1] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA
[2] Princeton Univ, Dept Chem, Princeton, NJ 08544 USA
[3] Princeton Univ, Princeton Inst Sci & Technol Mat PRISM, Princeton, NJ 08544 USA
基金
美国国家科学基金会;
关键词
dangling bonds; electron mobility; elemental semiconductors; MIS capacitors; organic semiconductors; passivation; semiconductor heterojunctions; silicon; transistors; CARRIER LIFETIMES; SOLAR-CELLS; MONOLAYERS; INTERFACE;
D O I
10.1063/1.3429585
中图分类号
O59 [应用物理学];
学科分类号
摘要
Merged organic-silicon heterojunction devices require the passivation of dangling bonds at the silicon surface, preferably with a low-temperature process. In this paper, we demonstrate the high-quality passivation of the silicon (100) surface using an organic molecule (9,10-phenanthrenequinone, PQ). PQ reacts with the dangling bonds, thus providing a bridge between organic semiconductors and silicon. We measure low recombination velocities (similar to 150 cm/s) at the PQ-silicon interface. Metal/organic-insulator/silicon capacitors and transistors prove that at PQ-silicon interface, the Fermi level can be modulated. The formation of an inversion layer with electron mobility of 600 cm(2)/V.s further demonstrates the passivation quality of PQ. (C) 2010 American Institute of Physics. [doi:10.1063/1.3429585]
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页数:3
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