Back-gate bias enhanced band-to-band tunneling leakage in scaled MOSFET's

The drain leakage current in MOSFET's in the present standard process is separated into three distinct components: the subthreshold conduction, the surface band-to-band tunneling (BTBT), and the bulk BTBT, Each of the three shows different dependencies on hack-gate bias, As a result, the hulk BTBT, increasing exponentially with increasing the magnitude of back-gate reverse bias, promptly dominates the drain leakage, Additional experiment highlights the effect of the increased hulk dopant concentrations as in next-generation scaled MOSFET's on the bulk BTBT, This sets the hulk BTBT a significant constraint to the low-voltage. low-power, high-density circuits employing the back-gate reverse bias, In the work, the measured drain leakage of interest is successfully reproduced by two-dimensional (2-D) device simulation.