Micromachining program status at the SRRC

被引：20

作者：

Cheng, Y

Shew, BY

Shih, WP

Wang, SS

Lin, CY

Yang, WK

Lu, M

Lee, WH

机构：

[1] Synchrotron Radiat Res Ctr, Hsinchu 30077, Taiwan

[2] Natl Tsing Hua Univ, Hsinchu, Taiwan

[3] Natl Chiao Tung Univ, Hsinchu, Taiwan

[4] Natl Taiwan Univ, Taipei 10764, Taiwan

来源：

MICROSYSTEM TECHNOLOGIES | 1997年 / 4卷 / 01期

关键词：

Microstructure; Program Status; Joint Project; Domestic Industry; Foreign Institute;

D O I：

10.1007/s005420050083

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the micromachining program status of the micromachining laboratory at the SRRC. A preliminary LIGA process has been established. Many joint projects with local and foreign institutes to develop devices for domestic industries have been started. The interests in the application of the LIGA technology is continuously growing in Taiwan. Two-millimeter ultra-deep microstructures have been achieved.

引用

页码：12 / 16

页数：5

共 11 条

[1] Dose distribution of synchrotron x-ray penetrating materials of low atomic numbers [J].