Formation of high-quality octahedral and flattened diamond crystals on a-SiC/Si using inert-gas curtain combustion method

被引:5
作者
Abe, T
Suemitsu, M
机构
[1] Tohoku Inst Technol, Dept Elect, Taihaku Ku, Sendai, Miyagi 982, Japan
[2] Tohoku Univ, Elect Commun Res Inst, Sendai, Miyagi 98077, Japan
关键词
flattened diamond; combustion flame method; SEM; Raman;
D O I
10.1016/S0022-0248(97)00404-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
High-quality octahedral and flattened diamond crystals have been successfully synthesized using the inert-gas curtain combustion method on amorphous SIC(a-SiC) film preformed on Si substrates. The number density and the diameter of the diamond crystals were controlled by the a-SiC film thickness, while their morphology varied with the growth temperature. Flattened diamonds appeared at lower deposition temperatures. SEM and Raman observations indicate excellent crystallinity of these diamonds.
引用
收藏
页码:183 / 189
页数:7
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