MICROCRYSTALLINE DIAMOND DEPOSITION USING A COMBUSTION FLAME OF ACETYLENE AND OXYGEN WITH A MAGNETIC-FIELD

被引：19

作者：

ABE, T

SUEMITSU, M

MIYAMOTO, N

SATO, N

机构：

[1] TOHOKU UNIV,ELECT COMMUN RES INST,SENDAI,MIYAGI 980,JAPAN

[2] TOHOKU UNIV,FAC ENGN,DEPT ELECTR,SENDAI,MIYAGI 980,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 08期

关键词：

D O I：

10.1063/1.106298

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Microcrystalline diamonds were successfully deposited on an abraded molybdenum surface under a magnetic field using a combustion flame of acetylene (C2H2) and oxygen (O2) gases. The deposition rate was about 1-mu-m/min, which is an order larger than that obtained by conventional chemical vapor deposition methods. The magnetic field led to an increase of the deposited area and of the microcrystal diameter. The microcrystals show good crystallinity as observed from scanning electron microscopy, reflective electron diffraction, and x-ray diffraction measurements.

引用

页码：911 / 913

页数：3

共 18 条

[1]

ABE T, 1991, MEMO TOHOKU I TECHNO, V11, P121

[2] RAPID GROWTH OF DIAMOND FILMS BY ARC-DISCHARGE PLASMA CVD [J].