A silicon flow sensor for gases and liquids using AC measurements

被引：23

作者：

Bedö, G ^{[1
]}

Fannasch, H ^{[1
]}

Müller, R ^{[1
]}

机构：

[1] Tech Univ Munich, Lehrstuhl Tech Elekt, D-80333 Munich, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 85卷 / 1-3期

关键词：

thermal flow sensor; temperature modulation;

D O I：

10.1016/S0924-4247(00)00380-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper. a silicon thermal flow sensor will be described. It consists of a heater and two sensing probes placed symmetrically to the heater. one upstream and one downstream. All sensor elements are platinum thin films placed on one silicon nitride membrane for thermal insulation from the surrounding. Using modulation techniques, the sensor behaviour can be improved. A faster response to temperature changes, an elimination of slow transient phenomena, and the insensitivity to changes in medium temperature are its advantages. The same sensor can be used for velocity measurements of gases and water. With a simple one-dimensional model, the sensor behaviour in gases and water can be estimated in relation to each other. (C) 2000 Elsevier Science S.A. All rights reserved.

引用

页码：124 / 132

页数：9

共 11 条

[1]

AIGNER R, 1996, THESIS TU MUNCHEN

[2]

BEDO G, 1988, TEMPRATURMODULATION

[3]

Incropera F. P., 1987, INTRO HEAT TRANSFER

[4]

KUNTZ W, 1988, TECH MESS, V55, P44

[5] MICRO-LIQUID FLOW SENSOR [J].

LAMMERINK, TSJ ;

TAS, NR ;

ELWENSPOEK, M ;

FLUITMAN, JHJ .

SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :45-50

[6]

MERKER GP, 1987, KONVEKTIVE WARMEUBER

[7] FABRICATION AND MODELING OF CMOS MICROBRIDGE GAS-FLOW SENSORS [J].

MOSER, D ;

LENGGENHAGER, R ;

WACHUTKA, G ;

BALTES, H .

SENSORS AND ACTUATORS B-CHEMICAL, 1992, 6 (1-3) :165-169

[8] A CMOS INTEGRATED SILICON GAS-FLOW SENSOR WITH PULSE-MODULATED OUTPUT [J].

STEMME, G .

SENSORS AND ACTUATORS, 1988, 14 (03) :293-303

[9] SILICON THERMAL FLOW SENSORS [J].

VANOUDHEUSDEN, BW .

SENSORS AND ACTUATORS A-PHYSICAL, 1992, 30 (1-2) :5-26

[10]

VANOUDHEUSDEN BW, 1995, SENS ACTUATORS A, V21, P37

← 1 2 →