The design and operation of a MEMS differential scanning nanocalorimeter for high-speed heat capacity measurements of ultrathin films

被引：81

作者：

Olson, EA ^{[1
]}

Yu, M

Efremov, Y

Zhang, M

Zhang, ZS

Allen, LH

机构：

[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

[2] Univ Illinois, Coordinated Sci Lab, Urbana, IL 61801 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2003年 / 12卷 / 03期

基金：

美国国家科学基金会;

关键词：

calorimetry; membranes; microelectromechanical; systems; microsensors; nanoparticles; plastic films; thin films;

D O I：

10.1109/JMEMS.2003.811755

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A MEMS sensor has been developed for use as a calorimetric cell in an ultra-sensitive, thin-film, differential scanning calorimetric technique. The sensor contains a freestanding, thin (30 nm to 1000 nm), low-stress silicon nitride membrane with lateral dimensions of a few millimeters. This membrane, along with a thin (50 mu) metallization layer, forms a calorimetric cell with an exceptionally small addenda. This small addenda creates a very sensitive calorimetric cell, able to make heat capacity measurements of nanometer-thick metal and polymer films. The sensor fabrication and various design considerations are discussed in detail. The calorimetric technique and examples of applications are described.

引用

页码：355 / 364

页数：10

共 35 条

[1] Detection of luminescent single ultrasmall silicon nanoparticles using fluctuation correlation spectroscopy [J].

Akcakir, O ;

Therrien, J ;

Belomoin, G ;

Barry, N ;

Muller, JD ;

Gratton, E ;

Nayfeh, M .

APPLIED PHYSICS LETTERS, 2000, 76 (14) :1857-1859

[2] SMALL PARTICLE MELTING OF PURE METALS [J].

ALLEN, GL ;

BAYLES, RA ;

GILE, WW ;

JESSER, WA .

THIN SOLID FILMS, 1986, 144 (02) :297-308

[3] SIZE EFFECT ON MELTING TEMPERATURE OF GOLD PARTICLES [J].

BUFFAT, P ;

BOREL, JP .

PHYSICAL REVIEW A, 1976, 13 (06) :2287-2298

[4] THIN-FILM MICROCALORIMETER FOR HEAT-CAPACITY MEASUREMENTS FROM 1.5-K TO 800-K [J].

DENLINGER, DW ;

ABARRA, EN ;

ALLEN, K ;

ROONEY, PW ;

MESSER, MT ;

WATSON, SK ;

HELLMAN, F .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04) :946-958

[5] Entropic effects on the size dependence of cluster structure [J].

Doye, JPK ;

Calvo, F .

PHYSICAL REVIEW LETTERS, 2001, 86 (16) :3570-3573

[6] Discrete periodic melting point observations for nanostructure ensembles [J].

Efremov, MY ;

Schiettekatte, F ;

Zhang, M ;

Olson, EA ;

Kwan, AT ;

Berry, RS ;

Allen, LH .

PHYSICAL REVIEW LETTERS, 2000, 85 (17) :3560-3563

[7] Thin-film differential scanning calorimetry: A new probe for assignment of the glass transition of ultrathin polymer films [J].

Efremov, MY ;

Warren, JT ;

Olson, EA ;

Zhang, M ;

Kwan, AT ;

Allen, LH .

MACROMOLECULES, 2002, 35 (05) :1481-1483

[8]

Feldman L. C., 1986, Fundamentals of Surface and Thin Film Analysis

[9] MEASUREMENTS AND INTERPRETATION OF ELECTRICAL-RESISTIVITY AND HALL-COEFFICIENT IN POLYCRYSTALLINE GOLD-FILMS .1. [J].

GOLMAYO, D ;

SACEDON, JL .

THIN SOLID FILMS, 1976, 35 (02) :137-141

[10] X-ray detection using a superconducting transition-edge sensor microcalorimeter with electrothermal feedback [J].

Irwin, KD ;

Hilton, GC ;

Wollman, DA ;

Martinis, JM .

APPLIED PHYSICS LETTERS, 1996, 69 (13) :1945-1947

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