Characterization of interfacial roughness in Co/Cu multilayers by x-ray scattering

被引：20

作者：

Gu, T

Goldman, AI

Mao, M

机构：

[1] IOWA STATE UNIV,DEPT PHYS & ASTRON,AMES,IA 50011

[2] MCMASTER UNIV,DEPT PHYS & ASTRON,HAMILTON,ON L8S 4M1,CANADA

来源：

PHYSICAL REVIEW B | 1997年 / 56卷 / 11期

关键词：

D O I：

10.1103/PhysRevB.56.6474

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The interfacial roughness of a magnetron-sputtered Si(001)/[Co 12 Angstrom/Cu 9.7 Angstrom](30)/(Cu 30 Angstrom) multilayer was investigated by x-ray scattering, and partial conformal roughness was observed. Specular. longitudinal, and transverse diffuse intensities were acquired by a high-resolution triple-crystal x-ray diffractometer and evaluated simultaneously based on the distorted-wave Born approximation. An approach to the analysis of the diffuse signal is proposed.

引用

页码：6474 / 6477

页数：4

共 25 条

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Barabasi A-Ls, 1995, FRACTAL CONCEPTS SUR, DOI [10.1017/CBO9780511599798, DOI 10.1017/CBO9780511599798]

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