Comparison of 3C-SiC, 6H-SiC and 4H-SiC MESFETs performances

A comparative analysis of the main DC and microwave performances of MESFETs made of the commercially available silicon carbide polytypes 3C-SiC, 6H-SiC and 4H-SiC is presented. In this purpose, we have developed an analytical model that takes into account the basic material properties such as field dependent mobility, critical electric field, ionization grade of impurities, and saturation of the charge carrier velocity. For a better precision in appreciating device characteristics in the case of a short gate device, the influences of the gate length and parasitic elements of the structure, e.g. source and drain resistances, are considered too. Cut-off frequency f(T), the corresponding output power P-m and the thermal stability are also evaluated and compared with the available experimental data, revealing the specific electrical performances of MESFETs, when any of the three polytypes is used in device fabrication, (C) 2000 Elsevier Science Ltd. All rights reserved.