共 23 条
[3]
BROSTIN J, 1995, SCANNING, V17, P327, DOI 10.1002/sca.4950170511
[5]
INTERFERENCE MICROSCOPY ON THIN DIBLOCK COPOLYMER FILMS
[J].
JOURNAL DE PHYSIQUE,
1990, 51 (08)
:777-786
[8]
Lithography with a mask of block copolymer microstructures
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1998, 16 (02)
:544-552