Depth profiling block copolymer microdomains

被引:96
作者
Harrison, C
Park, M
Chaikin, P [1 ]
Register, RA
Adamson, DH
Yao, N
机构
[1] Princeton Univ, Dept Phys, Princeton, NJ 08544 USA
[2] Princeton Univ, Dept Chem Engn, Princeton, NJ 08544 USA
[3] Princeton Univ, Princeton Mat Inst, Princeton, NJ 08544 USA
关键词
D O I
10.1021/ma9716037
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
We have studied the microdomain pattern in a block copolymer system using a recently developed imaging technique. We observe pronounced registry of microdomains from layer to layer, the propagation and evolution of disclinations, and novel morphologies which form at the edge of an island, The imaging of the microdomains is achieved with a nonselective etching technique which smoothly etches away sufficient material to expose the underlying microdomain layer to the surface. Using a low-voltage, high-resolution scanning electron microscope, we image the microdomains of this exposed layer which have been tagged with a staining agent.
引用
收藏
页码:2185 / 2189
页数:5
相关论文
共 23 条
[1]   NEUTRON REFLECTIVITY STUDIES OF THE SURFACE-INDUCED ORDERING OF DIBLOCK COPOLYMER FILMS [J].
ANASTASIADIS, SH ;
RUSSELL, TP ;
SATIJA, SK ;
MAJKRZAK, CF .
PHYSICAL REVIEW LETTERS, 1989, 62 (16) :1852-1855
[2]   BLOCK COPOLYMER THERMODYNAMICS - THEORY AND EXPERIMENT [J].
BATES, FS ;
FREDRICKSON, GH .
ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1990, 41 (01) :525-557
[3]  
BROSTIN J, 1995, SCANNING, V17, P327, DOI 10.1002/sca.4950170511
[4]   LOW-VOLTAGE SCANNING ELECTRON-MICROSCOPY OF POLYMERS [J].
BUTLER, JH ;
JOY, DC ;
BRADLEY, GF ;
KRAUSE, SJ .
POLYMER, 1995, 36 (09) :1781-1790
[5]   INTERFERENCE MICROSCOPY ON THIN DIBLOCK COPOLYMER FILMS [J].
COULON, G ;
AUSSERRE, D ;
RUSSELL, TP .
JOURNAL DE PHYSIQUE, 1990, 51 (08) :777-786
[6]   CATENOID-LAMELLAR PHASE IN BLENDS OF STYRENE-BUTADIENE DIBLOCK COPOLYMER AND HOMOPOLYMER [J].
DISKO, MM ;
LIANG, KS ;
BEHAL, SK ;
ROE, RJ ;
JEON, KJ .
MACROMOLECULES, 1993, 26 (11) :2983-2986
[7]   THE GYROID - A NEW EQUILIBRIUM MORPHOLOGY IN WEAKLY SEGREGATED DIBLOCK COPOLYMERS [J].
HAJDUK, DA ;
HARPER, PE ;
GRUNER, SM ;
HONEKER, CC ;
KIM, G ;
THOMAS, EL ;
FETTERS, LJ .
MACROMOLECULES, 1994, 27 (15) :4063-4075
[8]   Lithography with a mask of block copolymer microstructures [J].
Harrison, C ;
Park, M ;
Chaikin, PM ;
Register, RA ;
Adamson, DH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (02) :544-552
[9]   Layer by layer imaging of diblock copolymer films with a scanning electron microscope [J].
Harrison, C ;
Park, M ;
Chaikin, PM ;
Register, RA ;
Adamson, DH ;
Yao, N .
POLYMER, 1998, 39 (13) :2733-2744
[10]   MORPHOLOGY OF BLOCK COPOLYMERS AND MIXTURES OF BLOCK COPOLYMERS AT FREE SURFACES [J].
HASEGAWA, H ;
HASHIMOTO, T .
POLYMER, 1992, 33 (03) :475-487