The effect of ion energy upon plasma polymerization deposition rate for acrylic acid

被引：18

作者：

Barton, D

Short, RD

Fraser, S

Bradley, JW

机构：

[1] Univ Sheffield, Dept Mat Engn, Sheffield S1 3JD, S Yorkshire, England

[2] UMIST, Dept Phys, Manchester M60 1QD, Lancs, England

来源：

CHEMICAL COMMUNICATIONS | 2003年 / 03期

关键词：

D O I：

10.1039/b210781c

中图分类号：

O6 [化学];

学科分类号：

0703 [化学];

摘要：

A novel technique, which allows the importance of ion energy in plasma polymer film growth to be investigated, without perturbation of any other plasma parameter (particle densities or temperatures) or, in principle, perturbation of particle (neutral or ion) fluxes is applied in the plasma polymerisation of acrylic acid and new insight into polymer formation is gleaned.

引用

收藏

页码：348 / 349

页数：2

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