A MEMS thermopneumatic silicone rubber membrane valve

被引：53

作者：

Yang, X ^{[1
]}

Grosjean, C

Tai, YC

Ho, CM

机构：

[1] CALTECH, Dept Elect Engn, Pasadena, CA 91125 USA

[2] Univ Calif Los Angeles, Dept Mech Aerosp & Nucl Engn, Los Angeles, CA 90095 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 64卷 / 01期

关键词：

valves; silicone rubber membranes; thermopneumatic actuation;

D O I：

10.1016/S0924-4247(97)01660-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a technology for fabricating silicone rubber membranes and integrating them with other processes on a silicon wafer has been developed. Silicone rubber has been found to have exceptional mechanical properties, including low Young's modulus, high elongation, and good sealing. An integrated normally open valve using a silicone rubber membrane and 3M PF5060 liquid for thermopneumatic actuation has been fabricated and tested. For a 1.34 LPM (1 min(-1)) air flow, 280 mW power input is required to close the valve at 20 psi inlet pressure. Due to the high permeability of silicone rubber, most liquids used in thermopneumatic systems will be lost, necessitating more work to find a suitable barrier material compatible with silicone rubber. (C) 1998 Elsevier Science S.A.

引用

页码：101 / 108

页数：8

共 7 条

[1]

BARTH PW, 1995, 8 INT C SOL STAT SEN, V2, P276

[2]

BOUSSE L, 1996, SOL STAT SENS ACT WO, P272

[3] MECHANICAL PROPERTY MEASUREMENTS OF THIN-FILMS USING LOAD DEFLECTION OF COMPOSITE RECTANGULAR MEMBRANES [J].

TABATA, O ;

KAWAHATA, K ;

SUGIYAMA, S ;

IGARASHI, I .

SENSORS AND ACTUATORS, 1989, 20 (1-2) :135-141

[4]

VIEIDER C, 1995, 8 INT C SOL STAT SEN, V2, P284

[5]

WANG XQ, 1997, 9 INT C SOL STAT SEN, V2, P1505

[6]

Zdeblick M. J., 1994, SOL STAT SENS ACT WO, P251

[7]

ZDEBLICK MJ, 1988, THESIS STANFORD U

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