MECHANICAL PROPERTY MEASUREMENTS OF THIN-FILMS USING LOAD DEFLECTION OF COMPOSITE RECTANGULAR MEMBRANES

[1] MICROFABRICATED STRUCTURES FOR THE INSITU MEASUREMENT OF RESIDUAL-STRESS, YOUNGS MODULUS, AND ULTIMATE STRAIN OF THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1987, 51 (04) : 241 - 243

[2] A TECHNIQUE FOR THE DETERMINATION OF STRESS IN THIN-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1364 - 1366

[3] INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 724 - 730

[4] FAN LS, 1989, FEB IEEE MICR EL SYS, P40

[5] A SIMPLE TECHNIQUE FOR THE DETERMINATION OF MECHANICAL STRAIN IN THIN-FILMS WITH APPLICATIONS TO POLYSILICON [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (05) : 1671 - 1675

[6] Howe R. T., 1983, Sensors and Actuators, V4, P447, DOI 10.1016/0250-6874(83)85056-2

[7] STRESS IN POLYCRYSTALLINE AND AMORPHOUS-SILICON THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4674 - 4675

[8] NOVEL MICROSTRUCTURES FOR THE INSITU MEASUREMENT OF MECHANICAL-PROPERTIES OF THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (09) : 3579 - 3584

[9] NAJAFI K, 1989, FEB P IEEE WORKSH MI, P96

[10] YOUNGS MODULUS MEASUREMENTS OF THIN-FILMS USING MICROMECHANICS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 6761 - 6766

[1] MICROFABRICATED STRUCTURES FOR THE INSITU MEASUREMENT OF RESIDUAL-STRESS, YOUNGS MODULUS, AND ULTIMATE STRAIN OF THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1987, 51 (04) : 241 - 243

[2] A TECHNIQUE FOR THE DETERMINATION OF STRESS IN THIN-FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 1364 - 1366

[3] INTEGRATED MOVABLE MICROMECHANICAL STRUCTURES FOR SENSORS AND ACTUATORS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 724 - 730

[4] FAN LS, 1989, FEB IEEE MICR EL SYS, P40

[5] A SIMPLE TECHNIQUE FOR THE DETERMINATION OF MECHANICAL STRAIN IN THIN-FILMS WITH APPLICATIONS TO POLYSILICON [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (05) : 1671 - 1675

[6] Howe R. T., 1983, Sensors and Actuators, V4, P447, DOI 10.1016/0250-6874(83)85056-2

[7] STRESS IN POLYCRYSTALLINE AND AMORPHOUS-SILICON THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4674 - 4675

[8] NOVEL MICROSTRUCTURES FOR THE INSITU MEASUREMENT OF MECHANICAL-PROPERTIES OF THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (09) : 3579 - 3584

[9] NAJAFI K, 1989, FEB P IEEE WORKSH MI, P96

[10] YOUNGS MODULUS MEASUREMENTS OF THIN-FILMS USING MICROMECHANICS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 6761 - 6766