NOVEL MICROSTRUCTURES FOR THE INSITU MEASUREMENT OF MECHANICAL-PROPERTIES OF THIN-FILMS

被引：69

作者：

MEHREGANY, M

HOWE, RT

SENTURIA, SD

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 09期

关键词：

D O I：

10.1063/1.339285

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：3579 / 3584

页数：6

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