DETERMINATION OF STRESS IN FILMS ON SINGLE CRYSTALLINE SILICON SUBSTRATES

[1] BLACKBURN H, 1961, 8 T NAT VAC S, V2, P943

[2] MECHANICAL STRESS CONSIDERATIONS IN THIN-FILM DEVICES [J]. SOLID-STATE ELECTRONICS, 1963, 6 (02) : 159 - &

[3] DENHARTOG JP, 1952, ADVANCED STRENGTH MA, P119

[4] STRESS ANISOTROPY IN EVAPORATED IRON FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (04) : 597 - 598

[5] FINEGAN JD, 1961, 8 T NAT VAC S, V2, P935

[6] THE CAUSE OF STRESS IN EVAPORATED METAL FILMS [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1954, 67 (414): : 497 - 500

[7] HOLMWOOD RA, UNPUBLISHED

[8] Kittel C., 1956, INTRO SOLID STATE PH, P85

[9] MEASUREMENT OF THE ELASTIC CONSTANTS OF SILICON SINGLE CRYSTALS AND THEIR THERMAL COEFFICIENTS [J]. PHYSICAL REVIEW, 1951, 83 (05): : 1080 - 1080

[10] Menter J.W., 1959, STRUCTURE PROPERTIES, P111

[1] BLACKBURN H, 1961, 8 T NAT VAC S, V2, P943

[2] MECHANICAL STRESS CONSIDERATIONS IN THIN-FILM DEVICES [J]. SOLID-STATE ELECTRONICS, 1963, 6 (02) : 159 - &

[3] DENHARTOG JP, 1952, ADVANCED STRENGTH MA, P119

[4] STRESS ANISOTROPY IN EVAPORATED IRON FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (04) : 597 - 598

[5] FINEGAN JD, 1961, 8 T NAT VAC S, V2, P935

[6] THE CAUSE OF STRESS IN EVAPORATED METAL FILMS [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1954, 67 (414): : 497 - 500

[7] HOLMWOOD RA, UNPUBLISHED

[8] Kittel C., 1956, INTRO SOLID STATE PH, P85

[9] MEASUREMENT OF THE ELASTIC CONSTANTS OF SILICON SINGLE CRYSTALS AND THEIR THERMAL COEFFICIENTS [J]. PHYSICAL REVIEW, 1951, 83 (05): : 1080 - 1080

[10] Menter J.W., 1959, STRUCTURE PROPERTIES, P111