Enhancement/depletion surface channel field effect transistors of diamond and their logic circuits

被引:27
作者
Hokazono, A [1 ]
Kawarada, H [1 ]
机构
[1] Waseda Univ, Sch Sci & Engn, Dept Elect & Commun Engn, Shinjuku Ku, Tokyo 169, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 12A期
关键词
diamond; microwave plasma-assisted CVD; as-grown surface; hydrogen termination; enhancement mode MESFET; depletion mode MESFET; electronegativity; Schottky barrier height; threshold voltage; E/D-type logic circuit;
D O I
10.1143/JJAP.36.7133
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using the p-type surface-conductive layer of diamond film, enhancement mode and depletion mode metal-semiconductor field effect transistors were fabricated on the same surface by changing the metals of the gate electrode. The threshold voltages of p-type metal semiconductor field effect transistors (MESFETs) can be controlled from negative (enhancement mode) to positive (depletion mode) as the electronegativities of gate metals increase. By the realization of high transconductance and the fabrication of enhancement and depletion mode MESFETs; the E/D-type logic circuits such as inverter; NAND and NOR circuits were fabricated for the first time.
引用
收藏
页码:7133 / 7139
页数:7
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