3D negative electrode stacks for integrated all-solid-state lithium-ion microbatteries

被引：56

作者：

Baggetto, Loic ^{[1
]}

Knoops, Harm C. M. ^{[2
,3
]}

Niessen, Rogier A. H. ^{[4
]}

Kessels, Wilhelmus M. M. ^{[2
]}

Notten, Peter H. L. ^{[1
,4
]}

机构：

[1] Eindhoven Univ Technol, Dept Chem Engn & Chem, NL-5600 MB Eindhoven, Netherlands

[2] Eindhoven Univ Technol, Dept Appl Phys, NL-5600 MB Eindhoven, Netherlands

[3] Mat Innovat Inst, NL-2600 GA Delft, Netherlands

[4] Philips Res Labs, NL-5656 AE Eindhoven, Netherlands

来源：

JOURNAL OF MATERIALS CHEMISTRY | 2010年 / 20卷 / 18期

关键词：

BATTERIES; DEPOSITION; TIN;

D O I：

10.1039/b926044g

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The deposition feasibility and electrochemical evaluation of highly structured negative electrode stacks for 3D-integrated batteries is demonstrated. The stacks comprise a TiN thin film, serving as both current collector and Li-barrier layer, covered by a polycrystalline Si (poly-Si) thin film as electrode material. In comparison with planar films, these poly-Si films present a storage capacity increase of about 5 x for the highest pore aspect ratio electrodes. The step coverage of poly-Si can be considerably improved by growing TiN and poly-Si into wide trenches. This results in much smoother poly-Si films and significantly improved step coverage. Further optimization of the trench dimensions should result in poly-Si films with a Li-storage capacity increase of more than one order of magnitude with respect to planar films.

引用

页码：3703 / 3708

页数：6

共 15 条

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