共 26 条
[1]
Ashley T, 1995, INST PHYS CONF SER, P345
[2]
GROWTH AND LUMINESCENCE PROPERTIES OF GAPN AND GAP1-XNX
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (02)
:829-831
[6]
BRICE J, 1987, EMIS DATA REV SERIES, V3
[7]
Burke TM, 2001, IPAP CONFERENCE SER, V2, P296
[8]
Bürkle L, 2000, APPL PHYS LETT, V77, P1659, DOI 10.1063/1.1310167
[10]
Kinetic energy distribution of nitrogen ions in an electron cyclotron resonance plasma
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1998, 16 (04)
:2132-2139