Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling

被引：92

作者：

Meister, A

Liley, M

Brugger, J

Pugin, R

Heinzelmann, H ^{[1
]}

机构：

[1] Swiss Ctr Elect & Microtechnol CSEM SA, CH-2007 Neuchatel, Switzerland

[2] Swiss Fed Inst Technol EPFL, CH-1015 Lausanne, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 25期

关键词：

D O I：

10.1063/1.1842352

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this letter, we describe the on-demand dispensing of single liquid droplets with volumes down to a few attoliters and submicrometric spacing. This dispensing is achieved using a standard atomic force microscope probe, with a 200 nm aperture at the tip apex, opened by focused ion beam milling. The inside of the tip is used as reservoir for the liquid. This maskless dispensing, realized in ambient environment, permits the direct creation of droplet arrays. Nanoparticles, suspended in the liquid, were organized on a surface. (C) 2004 American Institute of Physics.

引用

收藏

页码：6260 / 6262

页数：3

相关论文

共 12 条

[1]

Adamson A.W., 1967, Physical chemistry of surfaces

[2] Fabrication of biological microarrays using microcantilevers [J].

Belaubre, P ;

Guirardel, M ;

Garcia, G ;

Pourciel, JB ;

Leberre, V ;

Dagkessamanskaia, A ;

Trévisiol, E ;

François, JM ;

Bergaud, C .

APPLIED PHYSICS LETTERS, 2003, 82 (18) :3122-3124

[3] Writing with DNA and protein using a nanopipet for controlled delivery [J].

Bruckbauer, A ;

Ying, LM ;

Rothery, AM ;

Zhou, DJ ;

Shevchuk, AI ;

Abell, C ;

Korchev, YE ;

Klenerman, D .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (30) :8810-8811

[4] A NONDESTRUCTIVE METHOD FOR DETERMINING THE SPRING CONSTANT OF CANTILEVERS FOR SCANNING FORCE MICROSCOPY [J].

CLEVELAND, JP ;

MANNE, S ;

BOCEK, D ;

HANSMA, PK .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (02) :403-405

[5] Scanning nanolithography using a material-filled nanopipette [J].

Hong, MH ;

Kim, KH ;

Bae, J ;

Jhe, W .

APPLIED PHYSICS LETTERS, 2000, 77 (16) :2604-2606

[6] DEPOSITION OF ORGANIC MATERIAL BY THE TIP OF A SCANNING FORCE MICROSCOPE [J].

JASCHKE, M ;

BUTT, HJ .

LANGMUIR, 1995, 11 (04) :1061-1064

[7] Fountain pen nanochemistry: Atomic force control of chrome etching [J].

Lewis, A ;

Kheifetz, Y ;

Shambrodt, E ;

Radko, A ;

Khatchatryan, E ;

Sukenik, C .

APPLIED PHYSICS LETTERS, 1999, 75 (17) :2689-2691

[8] Parallel nanodevice fabrication using a combination of shadow mask and scanning probe methods [J].

Lüthi, R ;

Schlittler, RR ;

Brugger, J ;

Vettiger, P ;

Welland, ME ;

Gimzewski, JK .

APPLIED PHYSICS LETTERS, 1999, 75 (09) :1314-1316

[9] Nanoscale dispensing of liquids through cantilevered probes [J].

Meister, A ;

Jeney, S ;

Liley, M ;

Akiyama, T ;

Staufer, U ;

de Rooij, NF ;

Heinzelmann, H .

MICROELECTRONIC ENGINEERING, 2003, 67-8 :644-650

[10] Dip-pen nanolithography [J].

Piner, RD ;

Zhu, J ;

Xu, F ;

Hong, SH ;

Mirkin, CA .

SCIENCE, 1999, 283 (5402) :661-663