Numerical modelling of gas discharge plasmas for various applications

被引：20

作者：

Bogaerts, A ^{[1
]}

Gijbels, R ^{[1
]}

机构：

[1] Univ Instelling Antwerp, Dept Chem, B-2610 Antwerp, Belgium

来源：

VACUUM | 2002年 / 69卷 / 1-3期

关键词：

gas discharge; plasma; numerical modelling;

D O I：

10.1016/S0042-207X(02)00306-8

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

Gas discharge plasmas are used for a wide range of applications. To improve our understanding about gas discharges, which is necessary to obtain good results in the various application fields, we perform numerical modelling of gas discharge plasmas. Various kinds of modelling approaches, for various types of gas discharges, are being used in our group. In this paper, some examples of this modelling work are outlined. (C) 2002 Elsevier Science Ltd. All rights reserved.

引用

页码：37 / 52

页数：16

共 73 条

[1]

Abeywickrama M. G., 1997, LAMPS LIGHTING, P194

[2]

ALACANT - MODELING OF GLOW-DISCHARGE SPUTTERING SYSTEMS [J].

ABRIL, I .

COMPUTER PHYSICS COMMUNICATIONS, 1988, 51 (03) :413-422

[3]

MEASUREMENT OF THE H- THERMAL-ENERGY IN A VOLUME ION-SOURCE PLASMA [J].

BACAL, M ;

BERLEMONT, P ;

BRUNETEAU, AM ;

LEROY, R ;

STERN, RA .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (03) :1212-1219

[4]

Hybrid model for a cylindrical hollow cathode glow discharge and comparison with experiments [J].

Baguer, N ;

Bogaerts, A ;

Gijbels, R .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2002, 57 (02) :311-326

[5]

Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach [J].

Berezhnoi, SV ;

Kaganovich, ID ;

Tsendin, LD ;

Schweigert, VA .

APPLIED PHYSICS LETTERS, 1996, 69 (16) :2341-2343

[6]

PARTICLE-IN-CELL CHARGED-PARTICLE SIMULATIONS, PLUS MONTE-CARLO COLLISIONS WITH NEUTRAL ATOMS, PIC-MCC [J].

BIRDSALL, CK .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :65-85

[7]

NUMERICAL-MODEL OF RF GLOW-DISCHARGES [J].

BOEUF, JP .

PHYSICAL REVIEW A, 1987, 36 (06) :2782-2792

[8]

MONTE-CARLO SIMULATION OF AN ANALYTICAL GLOW-DISCHARGE - MOTION OF ELECTRONS, IONS AND FAST NEUTRALS IN THE CATHODE DARK SPACE [J].

BOGAERTS, A ;

VANSTRAATEN, M ;

GIJBELS, R .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1995, 50 (02) :179-196

[9]

HYBRID MONTE-CARLO FLUID MODEL OF A DIRECT-CURRENT GLOW-DISCHARGE [J].

BOGAERTS, A ;

GIJBELS, R ;

GOEDHEER, WJ .

JOURNAL OF APPLIED PHYSICS, 1995, 78 (04) :2233-2241

[10]

Calculation of gas heating in direct current argon glow discharges [J].

Bogaerts, A ;

Gijbels, R ;

Serikov, VV .

JOURNAL OF APPLIED PHYSICS, 2000, 87 (12) :8334-8344

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