Calculation of gas heating in direct current argon glow discharges

被引:93
作者
Bogaerts, A
Gijbels, R
Serikov, VV
机构
[1] Univ Instelling Antwerp, Dept Chem, B-2610 Antwerp, Belgium
[2] Nippon Sheet Glass Co Ltd, Simulat Grp, Prod Engn Ctr, Ichihara, Chiba 2990107, Japan
关键词
D O I
10.1063/1.373545
中图分类号
O59 [应用物理学];
学科分类号
摘要
A model is developed for self-consistently calculating the gas temperature in a direct current argon glow discharge, used for analytical spectroscopy. The power input into the argon gas due to elastic (i.e., kinetic energy transfer) collisions of Ar+ ions, and fast Ar atoms, sputtered Cu atoms and electrons with the argon gas atoms is calculated with Monte Carlo models. This power input is used in a heat transfer model to calculate the gas temperature. The amount of power input, the contributions of the various input sources, and the resulting gas temperature are calculated for a wide range of voltages, pressures, and currents, typically applied in analytical spectroscopy. It is found that the temperature can increase significantly at high voltages, pressures, and currents (up to a factor of 3 compared to absolute room temperature). (C) 2000 American Institute of Physics. [S0021-8979(00)04012-3].
引用
收藏
页码:8334 / 8344
页数:11
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