Controlled deposition of carbon nanotubes on a patterned substrate

被引:115
作者
Choi, KH
Bourgoin, JP [1 ]
Auvray, S
Esteve, D
Duesberg, GS
Roth, S
Burghard, M
机构
[1] CEA Saclay, Serv Chim Mol, F-91191 Gif Sur Yvette, France
[2] CEA Saclay, Serv Phys Etat Condense, F-91191 Gif Sur Yvette, France
[3] Max Planck Inst Festkorperforsch, D-70659 Stuttgart, Germany
关键词
atomic force microscopy; chemical vapor deposition; chemisorption; electrical transport measurements; scanning electron microscopy (SEM); silane;
D O I
10.1016/S0039-6028(00)00609-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We describe a new technique for the preparation of reactive templates of 1,2-aminopropyltriethoxysilane on silica surfaces, based on the chemical vapour deposition of silane molecules through a PMMA mask patterned by conventional electron-beam lithography. The template thickness and width are controlled down to the monolayer and 50 nm ranges respectively. These templates are successfully used for the selective deposition of sodium dodecylsulphate-covered single walled nanotubes at controlled locations on the surface. We demonstrate that this technique allows one to contact nanotubes with metallic electrodes deposited on top of the tubes and opens the way towards the formation of controlled crossings of nanotubes. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:195 / 202
页数:8
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