Cu segregation at the Al(Cu)Al2O3 interface

被引：19

作者：

Copel, M

Rodbell, KP

Tromp, RM

机构：

[1] IBM Research Division, T. J. Watson Research Center, Yorktown Heights, NY 10598

来源：

APPLIED PHYSICS LETTERS | 1996年 / 68卷 / 12期

关键词：

D O I：

10.1063/1.115672

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have investigated the segregational properties of polycrystalline Al(Cu) alloys in the composition range of 0.04 to 0.5 at. % Cu using medium energy ion scattering. While Cu does not segregate to the bare surface, significant quantities of Cu are found at the interface between the Al(Cu) and aluminum oxide. By measuring the interfacial Cu concentration as a function of temperature, we have determined that the segregational energy is 0.21+/-0.03 eV. (C) 1996 American Institute of Physics.

引用

页码：1625 / 1627

页数：3

共 14 条

[1]

CLEVENGER LA, COMMUNICATION

[2] THE ROLE OF CU DISTRIBUTION AND AL2CU PRECIPITATION ON THE ELECTROMIGRATION RELIABILITY OF SUBMICROMETER AL(CU) LINES [J].