Fabrication of MgB2 thin film by rf magnetron sputtering

被引：16

作者：

Ahn, JR

Lee, SG

Hwang, YS

Sung, GY

Kim, DK

机构：

[1] Korea Univ, Dept Phys, Jochiwon 339800, Chungnam, South Korea

[2] Korea Univ, Sungbuk Ku, Seoul 136701, South Korea

[3] Elect & Telecommun Res Inst, Taejon 305350, South Korea

[4] Korea Adv Inst Sci & Technol, Taejon 305701, South Korea

来源：

PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS | 2003年 / 388卷

关键词：

MgB2 thin film; superconducting; sputtering;

D O I：

10.1016/S0921-4534(02)02368-7

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fabrication of superconducting MgB2 thin film on SrTiO3 and sapphire substrates by rf magnetron sputtering has been studied. We have tried both single target sputtering method using an Mg-excessive MgB2 target and co-sputtering of Mg and B. Argon sputtering pressure was 20 mTorr and 5% of hydrogen gas was added to trap the remanant oxygen gas in the deposition chamber. Films made by co-sputtering at room temperature followed by in situ annealing at 600 degreesC showed transition temperatures of about 24 K. However, those by single target sputtering or in situ co-sputtering showed either no superconducting transition or low T-c. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

收藏

页码：127 / 128

页数：2

相关论文

共 9 条

[1] Superconducting Mg-B films by pulsed-laser deposition in an in situ two-step process using multicomponent targets [J].

Blank, DHA ;

Hilgenkamp, H ;

Brinkman, A ;

Mijatovic, D ;

Rijnders, G ;

Rogalla, H .

APPLIED PHYSICS LETTERS, 2001, 79 (03) :394-396

[2] In situ growth of superconducting MgB2 thin films with preferential orientation by molecular-beam epitaxy [J].

Jo, W ;

Huh, JU ;

Ohnishi, T ;

Marshall, AF ;

Beasley, MR ;

Hammond, RH .

APPLIED PHYSICS LETTERS, 2002, 80 (19) :3563-3565

[3] MgB2 superconducting thin films with a transition temperature of 39 kelvin [J].

Kang, WN ;

Kim, HJ ;

Choi, EM ;

Jung, CU ;

Lee, SL .

SCIENCE, 2001, 292 (5521) :1521-1523

[4] High critical current densities in superconducting MgB2 thin films [J].

Moon, SH ;

Yun, JH ;

Lee, HN ;

Kye, JI ;

Kim, HG ;

Chung, W ;

Oh, B .

APPLIED PHYSICS LETTERS, 2001, 79 (15) :2429-2431

[5] Superconductivity at 39 K in magnesium diboride [J].

Nagamatsu, J ;

Nakagawa, N ;

Muranaka, T ;

Zenitani, Y ;

Akimitsu, J .

NATURE, 2001, 410 (6824) :63-64

[6] Superconducting MgB2 thin films by pulsed laser deposition [J].

Shinde, SR ;

Ogale, SB ;

Greene, RL ;

Venkatesan, T ;

Canfield, PC ;

Bud'ko, SL ;

Lapertot, G ;

Petrovic, C .

APPLIED PHYSICS LETTERS, 2001, 79 (02) :227-229

[7] As-grown superconducting MgB2 thin films prepared by molecular beam epitaxy [J].

Ueda, K ;

Naito, M .

APPLIED PHYSICS LETTERS, 2001, 79 (13) :2046-2048

[8] Superconducting properties of nanocrystalline MgB2 thin films made by an in situ annealing process [J].

Zeng, XH ;

Sukiasyan, A ;

Xi, XX ;

Hu, YF ;

Wertz, E ;

Li, Q ;

Tian, W ;

Sun, HP ;

Pan, XQ ;

Lettieri, J ;

Schlom, DG ;

Brubaker, CO ;

Liu, ZK ;

Li, Q .

APPLIED PHYSICS LETTERS, 2001, 79 (12) :1840-1842

[9] Superconducting magnesium diboride films on Si with Tc0∼24 K grown via vacuum annealing from stoichiometric precursors [J].

Zhai, HY ;

Christen, HM ;

Zhang, L ;

Cantoni, C ;

Paranthaman, M ;

Sales, BC ;

Christen, DK ;

Lowndes, DH .

APPLIED PHYSICS LETTERS, 2001, 79 (16) :2603-2605