Chemistry and kinetics of chemical vapor deposition of pyrocarbon - II - Pyrocarbon deposition from ethylene, acetylene and 1,3-butadiene in the low temperature regime

被引:147
作者
Becker, A [1 ]
Huttinger, KJ [1 ]
机构
[1] Univ Karlsruhe, Inst Chem Tech, D-76128 Karlsruhe, Germany
关键词
pyrolytic carbon; chemical vapor deposition;
D O I
10.1016/S0008-6223(97)00175-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Pyrocarbon deposition from ethylene, acetylene and 1,3-butadiene was studied with a vertical hot-wall reactor at ambient pressure and 1000 degrees C; initial partial pressures of the hydrocarbons and residence time were varied. Steady-state pyrocarbon deposition rates and corresponding compositions of the gas-phase were determined. Reaction models describing homogeneous gas-phase and heterogeneous pyrocarbon deposition reactions were derived and applied for simulation of pyrocarbon deposition rates and the inhibiting effect of hydrogen. This latter effect is ascribed to a blocking of active sites at the growing pyrocarbon surface. (C) 1998 Elsevier Science Ltd. All rights reserved.
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页码:177 / 199
页数:23
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