Surface structure and properties of multicomponent micropatterned organosilane monolayers prepared by stepwise photodecomposition and chemisorption process

被引：7

作者：

Koga, Tomoyuki ^{[1
]}

Morita, Masamichi ^{[1
]}

Sakata, Hiroki ^{[1
]}

Otsuka, Hideyuki ^{[1
]}

Takahara, Atsushi ^{[1
]}

机构：

[1] Kyushu Univ, Inst Fundamental Res Organ Chem, Higashi Ku, Fukuoka 8128581, Japan

来源：

International Journal of Nanoscience, Vol 1, Nos 5 and 6 | 2002年 / 1卷 / 5-6期

关键词：

organosilane; photodecomposition; surface nanostructure; surface properties;

D O I：

10.1142/S0219581X02000437

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Multicomponent micropatterned organosilane monolayers were successfully fabricated on Si substrate by stepwise vacuum ultraviolet-ray (VUV) photodecomposition and chemisorption process. The area specific introduction of different organosilane molecules was confirmed by X-ray photoelectron spectroscopy (XPS). Atomic force microscopic (AFM) observation and lateral force microscopic (LFM) measurement revealed that the line-widths of the micropatterned surface corresponded to those of photomask. Micropatterning of the functional groups influenced the magnitudes of the surface free energy. The patterned surface was also applied for the site-specific polymerization and site-specific adsorption of microparticles.

引用

页码：419 / 423

页数：5

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