Micromechanical ultrasonic liquid nebulizer

被引：5

作者：

Paneva, R ^{[1
]}

Temmel, G ^{[1
]}

Burte, E ^{[1
]}

Ryssel, H ^{[1
]}

机构：

[1] FRAUNHOFER INST INTEGRATED CIRCUITS,D-91058 ERLANGEN,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 62卷 / 1-3期

关键词：

micromechanics; piezoelectricity; ultrasonic nebulization;

D O I：

10.1016/S0924-4247(97)01580-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A piezoelectric ZnO layer is used to set a thin silicon membrane into vibration. The possibility of applying this micromechanical structure for ultrasonic nebulization of liquids is studied. The dependence of the resulting drop distribution on membrane vibration frequency and liquid material parameters is compared with the predictions of the capillary wave theory. (C) 1997 Elsevier Science S.A.

引用

页码：765 / 767

页数：3

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