Room temperature two-terminal characteristics in silicon nanowires

被引:15
作者
Hu, SF
Wong, WZ
Liu, SS
Wu, YC
Sung, CL
Huang, TY
机构
[1] Natl Nano Device Labs, Hsinchu 300, Taiwan
[2] Natl Chiao Tung Univ, Inst Elect, Hsinchu 300, Taiwan
关键词
nanostructures; nanofabrications; tunnelling;
D O I
10.1016/S0038-1098(02)00807-4
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Quantum effects in silicon nanowires due to one-dimensional carrier confinement were observed at room temperature. Electrical transport properties were measured, on narrow thin-silicon-on-insulator wires that were defined by e-beam lithography and further narrowed and thinned down by oxidation to a final thickness of around 3 nm, and a width of 29 nm. The room temperature current-voltage characteristics of the resulting silicon nanowires are shown to exhibit a zero current state may be due to the occurrence of Coulomb blockade. (C) 2003 Elsevier Science Ltd. All rights reserved
引用
收藏
页码:351 / 354
页数:4
相关论文
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