Thermal-spike theory of sputtering: The influence of elastic waves in a one-dimensional cylindrical spike

被引：36

作者：

Jakas, MM ^{[1
]}

Bringa, EM

机构：

[1] Univ La Laguna, Dept Fis Fundamental & Expt, Tenerife 38201, Spain

[2] Univ Virginia, Dept Engn Phys, Charlottesville, VA 22903 USA

来源：

PHYSICAL REVIEW B | 2000年 / 62卷 / 02期

关键词：

D O I：

10.1103/PhysRevB.62.824

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The sputtering yield (Y) from a thermal spike is calculated using an extended version of the standard thermal-spike theory, which includes the transport of mass, a more realistic heat capacity, and melting. The results show that introducing the heat of melting and using a heat capacity that accounts for the "equipartion theorem" at low temperatures has a significant influence on the sputtering yield at low deposited energies (dE/dX). The transport of mass within the spike becomes relevant at large deposited energies, where the thermal pressure in the hot core of the spike gives rise to an elastic wave which expands and cools the spike, lowering the sputtering yield.

引用

页码：824 / 830

页数：7

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