A novel fiber-optic sensor used for small internal curved surface measurement

被引：36

作者：

Zhao, Y

Li, PS

Wang, CS

Pu, ZB

机构：

[1] Harbin Inst Technol, Harbin 150001, Peoples R China

[2] Harbin Univ Sci & Technol, Harbin 150040, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2000年 / 86卷 / 03期

关键词：

fiber-optic sensor; internal surface; non-contact measurement; intensity-modulated;

D O I：

10.1016/S0924-4247(00)00441-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel fiber-optic sensor used for small internal curved surface measurement is presented. A measurement principle based on beam reflection is described. Theoretically calculated curves and measured values are given. The results provide an essential theoretical and design basis for the measurement of curved surfaces with fiber-optic sensor. This sensor, which is composed of eight symmetrically cross-arranged receiving fibers and one centered emitting fiber, can accomplish distance measurement with high vertical resolution of 0.1 mum through compensation of the impacts caused by fluctuations of the surface reflectivity and light power. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：211 / 215

页数：5

共 9 条

[1]

Aoyama H., 1989, CIRP Ann., V38, P517

[2] Interferometric measurement of surface roughness in engine cylinder walls [J].