Enthalpy probe diagnostics of an atmospheric pressure argon microwave induced plasma

被引:7
作者
Destefani, CA
Murphy, AB
Siores, E
Elchinger, MF
机构
[1] Swinburne Univ Technol, IRIS, Hawthorn, Vic 3122, Australia
[2] CSIRO, Lindfield, NSW 2070, Australia
[3] Univ Limoges, Fac Sci, F-87060 Limoges, France
关键词
D O I
10.1088/0022-3727/33/16/311
中图分类号
O59 [应用物理学];
学科分类号
摘要
An argon microwave-induced plasma (MIP) at atmospheric pressure was generated in a TE10 mode waveguide. The discharge was sustained by a relatively low absorbed power of around 215 W. An enthalpy probe was used to characterize the argon MIP discharge, yielding values of enthalpy, velocity and heavy particle temperature along the jet axis. The theory of the enthalpy probe operation and calibration is reviewed and the system for its implementation is described. The heavy particle temperature is found to be about 1600 K and the velocity to be about 150 m s(-1) at the exit plane of the discharge tube for an argon how rate of 1.61 min(-1). Although the assumption of local thermodynamic equilibrium is required to determine the temperature and velocity in the jet from the enthalpy probe measurements, it is argued that the values obtained should be reasonable even if, as expected in MIPs, the electron temperature is significantly higher than the heavy particle temperature.
引用
收藏
页码:1996 / 2003
页数:8
相关论文
共 31 条
[1]   COMPARISON OF TEMPERATURE-MEASUREMENTS IN ICP AND MIP WITH AR AND HE AS PLASMA GAS [J].
ABDALLAH, MH ;
MERMET, JM .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1982, 37 (05) :391-397
[2]   Numerical method and composition in multi-temperature plasmas: Application to an Ar-H-2 mixture [J].
Andre, P ;
Abbaoui, M ;
Lefort, A ;
Parizet, MJ .
PLASMA CHEMISTRY AND PLASMA PROCESSING, 1996, 16 (03) :379-398
[3]  
ANDRE P, 2000, IN PRESS PLASMA CHEM
[4]   SOME CONSIDERATIONS ON MICROWAVE ELECTRODELESS DISCHARGE - PLASMA DIAGNOSTICS IN ARGON, HELIUM OR NITROGEN ATMOSPHERES [J].
AVNI, R ;
WINEFORDNER, JD .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1975, 30 (08) :281-303
[5]   CAVITY FOR MICROWAVE-INDUCED PLASMAS OPERATED IN HELIUM AND ARGON AT ATMOSPHERIC-PRESSURE [J].
BEENAKKER, CIM .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1976, 31 (8-9) :483-486
[6]  
Boulos M.I., 1994, THERMAL PLASMAS, V1
[7]   PROBE MEASUREMENTS IN THERMAL PLASMA JETS [J].
BROSSA, M ;
PFENDER, E .
PLASMA CHEMISTRY AND PLASMA PROCESSING, 1988, 8 (01) :75-90
[8]  
BUSH KW, 1973, SPECTROCHIM ACTA B, V28, P85
[9]   DIAGNOSTIC OF A THERMAL PLASMA-JET BY OPTICAL-EMISSION SPECTROSCOPY AND ENTHALPY PROBE MEASUREMENTS [J].
CHEN, WLT ;
HEBERLEIN, J ;
PFENDER, E .
PLASMA CHEMISTRY AND PLASMA PROCESSING, 1994, 14 (03) :317-332
[10]   SPECTROSCOPIC DETERMINATION OF FUNDAMENTAL PARAMETERS IN AN ARGON MICROWAVE-INDUCED PLASMA (SURFATRON) AT ATMOSPHERIC-PRESSURE [J].
COTRINO, J ;
SAEZ, M ;
QUINTERO, MC ;
MENENDEZ, A ;
URIA, ES ;
MEDEL, AS .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1992, 47 (03) :425-435