Sliding-blade MEMS iris and variable optical attenuator

被引：76

作者：

Syms, RRA ^{[1
]}

Zou, H ^{[1
]}

Stagg, J ^{[1
]}

Veladi, H ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci & Technol, Opt & Semicond Devices Grp, Dept Elect & Elect Engn, London SW7 2BT, England

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2004年 / 14卷 / 12期

关键词：

D O I：

10.1088/0960-1317/14/12/015

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

An iris-type variable aperture fabricated using microelectromechanical systems (MEMS) technology is described. The device contains a number of shutter blades, which are each driven by a separate microactuator, and translated synchronously to create a variable polygonal aperture. The optical performance of devices with different numbers of blades is compared using simple analytic models and diffraction theory. The mechanism is simulated by finite element analysis. Four-blade devices driven by buckling mode electrothermal actuators are formed by double-sided patterning and deep reactive ion etching of bonded silicon-on-insulator and characterized experimentally. Symmetric deflections are obtained, and used to create a square pupil. Variable attenuation is demonstrated using optical fibres with thermally expanded cores.

引用

页码：1700 / 1710

页数：11

共 26 条

[1]

A fiber connectorized MEMS variable optical attenuator [J].